Clean manipulators
| Horizontal articulated type for carrying wafers |
NX510(2-Link, 1-Wrist)NX520(2-Link, 2-Wrist)NX540(3-Link, 1-Wrist)NX550(3-Link, 2-Wrist)
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NX540 |
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[Features]
･ Operations corresponding to 2FOUP and 3FOUP without the need for track are realized.
･ A minimum sweep diameter of ｯ508 mm is realized. It is possible to make replacement in the space necessary for a conventional track type robots.
･ Attains ISO Class 1 with the unique structure.
･ The arm structure has high rigidity, and access can be made freely to wafer stage of narrow pitch and FOUP at an arbitrary position.
･ High throughput (Up to 200 WPH, two wrist, continuous operation of FOUP Aligner Stage) is realized.
･ High linearity and high positioning accuracy.
･ Compliance with SEMI-F47 Standard. It instantly responds to circumstances such as a drop in voltage, and when the voltage is restored, it automatically begins the operation again.
･ Compliance with SEMI-S2 Standard. Sufficient consideration is given to the environment and safety.
･ It is equipped with a collision detection function, which alleviates damage caused by collisions.
･ By the adoption of an absolute encoder, homing is not required. |
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Model
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NX510
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NX520
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NX540
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NX550
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Basic construction
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Horizontal articulate arm
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Degree of motion
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4
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5
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4
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5
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θ (Rotation:JT2)
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330 ﾟ
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330 ﾟ
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318 ﾟ
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410 ﾟ
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Z (Up-down:JT3)
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440 mm
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440 mm
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440 mm
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440 mm
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X (Out-in:JT4)
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832 mm
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832 mm
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1,232 mm
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1,232 mm
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Lower W(Rotation:JT6)
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336 ﾟ
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336 ﾟ
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366 ﾟ
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390 ﾟ
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UpperW(Rotation:JT7)
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-
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336 ﾟ
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-
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390 ﾟ
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Repeatability
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±0.1 mm (Wafer center)
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Cleanliness
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ISO Class 1 (Measured by Kawasaki)
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| Horizontal articulated type for carrying wafers |
NS410 / NS510 (Single Arm), NS411(Single Arm + with FLIP), NS420(Double Arm)
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NS420 |
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[Features]
･ Owing to the high rigidity and high accuracy mechanical structure, open cassette, stable transfer to various ports and high speed motion are realized.
･ By our own unique state-of-the-art vibration insulation control, high accuracy, high speed operation is realized.
･ Compliance with SEMI-F47 Standard. It instantly responds to circumstances such as a drop in voltage, and when the voltage is restored, it automatically begins the operation again.
･ Compliance with SEMI-S2 Standard. Sufficient consideration is given to the environment and safety.
･ It is equipped with a collision detection function, which minimizes damage caused by collisions.
･ By the adoption of an absolute encoder homing is not necessary.
With an optional track unit, NS411 can make access up to 4 wafer ports. |
NS511(Drip-Proof Spcification + with FLAAP)
NS511 |
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[Features]
･ Designed for wet (chemical liquid) environment.
･ Access is possible to vertical ports.
･ It has a long reach of longer than 900 mm, enabling a broad operating range.
Utilizing our own unique state-of-the-art vibration insulation control, high accuracy, high speed operation is realized.
･ Compliance with SEMI-F47 Standard. It instantly responds to circumstances such as a drop in voltage, and when the voltage is restored, it automatically begins the operation again.
･ Compliance with SEMI-S2 Standard. Sufficient consideration is given to the environment and safety.
･ It is equipped with a collision detection function, which minimizes damage caused by collisions.
･ By the adoption of an absolute encoder homing is not necessary. |
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Model
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NS410
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NS411
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NS420
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Basic construction
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Horizontal articulate arm
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Degree of motion
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3
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4
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4
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Y (Travel:JT1)
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2port : 660 mm 3port : 1,070 mm 4port : 1,670 mm
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θ (Rotation:JT2)
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380 ﾟ
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325 ﾟ
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325 ﾟ
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Z (Up/Down:JT3)
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380 mm
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380 mm
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380 mm
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X (In/Out:JT4)
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710 mm
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798 mm
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X1:646.8 mm
X2:646.8 mm
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F (Rotation:JT5)
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-
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156ﾟ
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-
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Repeatability
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±0.1 mm (Wafer center)
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Cleanliness
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ISO Class 2
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Model
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NS510
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NS511
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Basic construction
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Horizontal articulate arm
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Degree of motion
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3
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4
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Y (Travel:JT1)
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-
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-
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θ (Rotation:JT2)
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360 ﾟ
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473 ﾟ
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Z (Up/Down:JT3)
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440 mm
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440 mm
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X (In/Out:JT4)
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598 mm
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816.5 mm
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F (Rotation:JT5)
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-
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200 ﾟ
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Repeatability
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±0.1 mm (Wafer center)
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Cleanliness
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ISO Class 2
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Class 100 (FS209E)
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| Telescopic FPD carrier type |
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TS311 |
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[Features]
･ Realizes a large Z stroke with its low minimum height.
･ Vertical layout of the unit can support buffer cassettes and mini-stockers.
･ Owing to the high rigidity and high accuracy mechanical structure, open cassette, stable transfer to various ports and high speed motion are realized.
･ By the adoption of an absolute encoder homing is not necessary. |
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Model
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TS310
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TS311
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TS320
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Basic construction
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Telescopic Arm
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Degree of motion
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4
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4
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4
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Y (Travel:JT1)
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1,100 mm / 1,540 mm
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460 mm / 600 mm
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-
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θ (Rotation:JT2)
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470 ﾟ
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470 ﾟ
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470 ﾟ
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Z (Up/Down:JT3)
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380 mm
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660 mm
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660 mm
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X (In/Out:JT4)
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317 mm
(Arm length is 90 mm)
448.5 mm
(Arm length is 135 mm)
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320 mm
(Arm length is 90 mm)
453.5 mm
(Arm length is 135 mm)
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320 mm
(Arm length is 90 mm)
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Repeatability
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±0.1 mm (Precision at the end of hand)
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Cleanliness
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ISO Class 2
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| Telescopic FPD carrier type |
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TS520 |
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[Features]
･ A compact design based on telescopic structure is achieved. Owing to double arm specifications, a minimum pass line of 930 mm and vertical stroke of 1,590 mm are realized.
･ A high speed operation consisting of placing and fetching operation of wafers + movement to the next position in a total time of less than 4 seconds has been realized.
･ A large operation range was secured within a small installation area (530 x 370 mm).
･ Owing to the high rigidity and high accuracy mechanical structure, open cassette, stable transfer to various ports and high speed motion are realized.
･ By the adoption of an absolute encoder homing is not necessary. |
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Model
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TS520
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Basic construction
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Telescopic Arm
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Degree of motion
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4
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θ (Rotation:JT2)
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360 ﾟ (Option)
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Z (Up/Down:JT3)
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1,590 mm
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X1 (In/Out:JT4)
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536 mm
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X2 (In/Out:JT5)
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536 mm
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Repeatability
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±0.1 mm (Precision at the end of hand)
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Cleanliness
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ISO Class 2
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| Telescopic Arm for transfer of large-type FPD |
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TL420 |
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[Features]
･ A compact design based on telescopic structure. Owing to double arm specifications, minimum pass line of 925 mm, vertical stroke of 1,420 mm was realized.
･ Utilizing our unique mechanism that suppresses the generation of particles, high cleanliness is secured.
･ High speed operation based on our own unique double slide arm structure. Horizontal operation of 1,500 mm / 1.2 seconds and vertical operation of 1,400 mm / 2.1 seconds have been achieved.
･ AC servo drive system based on vibration insulation servo control is adopted, and high speed, high accuracy smooth operation is realized.
･ By the adoption of an absolute encoder homing is not necessary. |
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Model
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TL420S
(TL420T)
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TL421S
(TL421T)
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TL220S
(TL220T)
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TL221S
(TL221T)
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Basic construction
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Telescopic arm
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Degree of motion
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Freedom 4/Drive axis 6/ (Freedom 5/Drive axis 軸7)
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Standard arm
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Long arm
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Standard arm
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Long arm
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Y (Travel:JT1)
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(1,260 mm / 2,460 mm / 3,660 mm)
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θ (Rotation:JT2)
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330 ﾟ
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330 ﾟ
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330 ﾟ
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330 ﾟ
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Z (Up/Down:JT3)
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1,420 mm
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1,410 mm
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760 mm
|
760 mm
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Lower X (In/Out:JT4)
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1,500 mm
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1,750 mm
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1,500 mm
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1,750 mm
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Upper X (In/Out:JT5)
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1,500 mm
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1,750 mm
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1,500 mm
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1,750 mm
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Repeatability
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±0.2 mm (Precision at the end of hand)
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Model
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TL410S
(TL410T)
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TL411S
(TL411T)
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TL210S
(TL210T)
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TL211S
(TL211T)
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Basic construction
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Telescopic Arm
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Degree of motion
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Freedom 3/Drive axis 4/ (Freedom 4/Drive axis 5)
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Standard arm
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Long arm
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Standard arm
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Long arm
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Y (Travel:JT1)
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(1,260 mm / 2,460 mm / 3,660 mm)
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θ (Rotation:JT2)
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330 ﾟ
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330 ﾟ
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330 ﾟ
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330 ﾟ
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Z (Up/Down:JT3)
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1,420 mm
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1,410 mm
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760 mm
|
760 mm
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Lower X (In/Out:JT4)
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1,500 mm
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1,750 mm
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1,500 mm
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1,750 mm
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Upper X (In/Out:JT5)
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-
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Repeatability
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±0.2 mm (Precision at the end of hand)
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| Vertical Articulated Arm |
 |
FC06N |
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[Features]
A six-axis high-performance robot that is compact and enables all kinds of positions. In particular, the 3 freedom movements at the wrist portion allow operation of 3-dimensional curve trajectory. The positions of the wafer and glass can be freely changed from horizontal to vertical or oblique.
It can be used for assembly work, fetching of work, drive-in work, etc. |
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Model
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FC02N
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FC06N/
FC06L
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FC10N
FC10L
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FC20N
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Basic construction
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Vertical Articulated Arm
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Degree of motion
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6
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6 (Option 7)
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腕旋回(JT1)
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±160 ﾟ
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腕前後(JT2)
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＋150 ﾟ ~ －60 ﾟ
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＋140 ﾟ ~ －105 ﾟ
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腕上下(JT3)
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＋120 ﾟ ~ －155 ﾟ
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手首回転(JT4)
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±360 ﾟ
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±270 ﾟ
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手首曲げ(JT5)
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±135 ﾟ
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±145 ﾟ
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手首捻り(JT5)
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±360ﾟ
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Repeatability
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±0.03 mm
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±0.05 mm/
±0.1 mm
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±0.1 mm
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Maximum Transportable Weight
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2 kg
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6 kg
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10 kg
|
20 kg
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Cleanliness
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Less than 10 of 0.3μm particles/CF (FC02/06/10/20)
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Model
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FC30N/
FC30L
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FC45N
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FC60L
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Basic construction
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Vertical Articulated Arm
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Degree of motion
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6 (Option 7)
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腕旋回(JT1)
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±160 ﾟ
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腕前後(JT2)
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＋140 ﾟ ~ －105 ﾟ
|
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腕上下(JT3)
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＋120 ﾟ ~ －155 ﾟ
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手首回転(JT4)
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±270 ﾟ
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手首曲げ(JT5)
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±130 ﾟ
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手首捻り(JT5)
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±360 ﾟ
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Repeatability
|
±0.15 mm
|
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Maximum Transportable Weight
|
30 kg
|
45 kg
|
60 kg
|
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Cleanliness
|
Less than 10 of 0.3μm particles/CF (FC02/06/10/20)
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